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Scratch Resistant Sapphire Window Mohs 9 Semiconductor Equipment Viewport
Product Specification
Place of Origin:
Guangdong, China
Brand Name:
ECER Optics
Certification:
ISO 9001:2015
Model Number:
SW-SEM-HARD
Minimum Order Quantity:
10 Pieces
Price:
USD 8-50 / Piece
Payment Terms:
T/T,PayPal,Western Union
Supply Ability:
30000 Pieces per Month
Product Details
Highlight:
Scratch Resistant Sapphire Window
,Semiconductor Equipment Window
,Mohs 9 Hardness Optics
Product Name:
Scratch Resistant Sapphire Window
Application:
Semiconductor Wafer Processing
Hardness:
Mohs 9
Material:
Single Crystal Sapphire Al2O3
Diameter:
Custom 10mm - 200mm
Chemical Resistance:
Acid, Base, And Plasma Resistant
Surface Quality:
60-40 Scratch-Dig
Flatness:
Lambda/4
Product Description
Scratch Resistant Sapphire Window Mohs 9 Semiconductor Equipment Viewport
This scratch resistant sapphire window is built for semiconductor equipment viewports, where process chambers expose windows to plasma, particle abrasion, and aggressive cleaning chemicals. The window is fabricated from single crystal sapphire with a Mohs hardness of 9, second only to diamond, which allows it to maintain a clean optical surface far longer than glass or quartz viewports.
For wafer processing tools that run continuously, the scratch resistant sapphire window reduces maintenance downtime and keeps inspection imaging consistent over the life of the chamber. Semiconductor environments demand more than hardness, which is why this sapphire window is also specified for chemical resistance to acids, bases, and plasma chemistries, plus thermal stability across the temperature swings of process cycling.
Each window is polished to a 60-40 scratch-dig surface quality with a flatness of lambda over 4, and edge profiles are ground and beveled to avoid stress concentrations in the mounting flange. Custom diameters from 10mm to 200mm and thicknesses matched to vacuum or atmospheric pressure ratings are available, and each shipment includes material certificates and dimensional inspection records for equipment qualification.
Technical Specifications
| Product Name | Scratch Resistant Sapphire Window |
|---|---|
| Material | Single Crystal Sapphire Al2O3 |
| Hardness | Mohs 9 |
| Diameter | Custom 10mm - 200mm |
| Thickness | 1.0mm - 8.0mm Custom |
| Surface Quality | 60-40 Scratch-Dig |
| Flatness | Lambda/4 @ 632.8nm |
| Chemical Resistance | Acid, Base, and Plasma Resistant |
| Application | Semiconductor Wafer Processing |
| Certificate | RoHS Compliant, ISO 9001:2015 |
Key Advantages
- Mohs 9 hardness resists particle and plasma-induced scratching
- Chemical inertness survives aggressive chamber cleaning chemistries
- Thermal stability handles process temperature cycling without fracture
- Beveled ground edges reduce stress concentration in the mounting flange
- Long service life cuts viewport replacement frequency and downtime
- Material certificates support semiconductor equipment qualification
- Custom sizes match vacuum and atmospheric process viewports
- Consistent optical clarity for wafer inspection through the window
The scratch resistant sapphire window is designed around the real operating conditions of semiconductor fabrication: repeated chamber opens, plasma cleans, and abrasive particle flows. Field data from equipment service programs shows that sapphire viewports typically outlast quartz by several times in etch and deposition tools, which directly reduces the cost of ownership for fab operators.
The window is also suitable for adjacent industries that share the same harsh environment profile, including flat panel display processing, solar cell manufacturing, and vacuum coating systems. Design engineers receive mounting guidance, including recommended flange tolerances and seal materials, so the scratch resistant sapphire window integrates into existing viewport designs without rework.
Product Q&A
Q: Why do semiconductor viewports need sapphire instead of quartz?
Process chambers generate plasma, particles, and reactive chemistries that quickly etch and scratch quartz viewports, clouding the optical path. Sapphire with Mohs 9 hardness resists this damage for much longer cycles, and its chemical inertness prevents degradation from cleaning agents. The result is fewer viewport changes and more stable inspection conditions.
Q: What pressure ratings can the window support?
The pressure rating depends on diameter, thickness, and mounting design. For typical 25mm to 100mm viewports, thicknesses from 2mm to 8mm support vacuum to several bar of differential pressure. We provide recommended thickness calculations for your specific chamber conditions.
Q: Can the window be coated for anti-reflection in the visible range?
Yes. While many semiconductor viewports use uncoated sapphire for maximum robustness, we can apply a durable AR coating for visible inspection wavelengths when higher transmission is needed. The coating is validated for plasma and chemical exposure before release.
Q: What documentation is provided for equipment qualification?
Each shipment includes sapphire material certificates, dimensional inspection reports, surface quality records, and RoHS declarations. For qualified programs we can also provide batch-level chemical resistance test data and thermal cycling results.
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